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Formation of light-emitting FeSi2 in Fe thin films on ion-implanted (111)Si
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Formation of light-emitting FeSi2 in Fe thin films on ion-implanted (111)Si

H.T. Lu, L.J. Chen, Y.L. Chueh and L.J. Chou
Journal of Applied Physics, Vol.93(3), pp.1468-1471
01/02/2003

Abstract

The formation of light emitting iron silicides and the effects of ion implantation on phase transformation were studied. The investigation is carried out using techniques like sheet resistance measurements, X ray diffraction, electron microscopy and mass spectroscopy. The growth of iron silicides was found to be enhanced by ion implantation.

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