- Title
- Full-Depth Optical Proximity Correction (FD-OPC) Based on E-D Forest
- Creators - without role
- 本堅 林
- Publication Details
- SPIE proceedings, Vol.3679
- Identifiers
- 9957777089706774
- Academic Unit
- Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Journal article
Journal article
Full-Depth Optical Proximity Correction (FD-OPC) Based on E-D Forest
SPIE proceedings, Vol.3679
1999
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