General scaling law of optical lithography optical theory

Journal article

Chun-Kuang Chen, Tsai-Sheng Gau, Li-Jui Chen, Chi-Chuang Li, Jaw-Jung Shin, Anthony Yen and 本堅林

SPIE Proceedings, Vol.5377

2004

Abstract

Optical lithography;resolution scaling;DOF scaling

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Title: General scaling law of optical lithography optical theory
Creators - without role: Chun-Kuang Chen
Tsai-Sheng Gau
Li-Jui Chen
Chi-Chuang Li
Jaw-Jung Shin
Anthony Yen
本堅林
Identifiers: 9957768958606774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Journal article
Publication Details: SPIE Proceedings, Vol.5377