Abstract
In this study, distinct regions of trapped charges on glass substrates created by electron beam bombardment were utilized to attract and to immobilize DNA molecules. The negatively charged DNA molecules were attracted by the positive charge layer beneath the substrate surface resulting from escape of secondary electrons. With this mechanism, we demonstrated high-precision patterning of unmodified DNA molecules, independent of the length, sequence, and number of DNA strands, and with an attachment to the glass surface strong enough to withstand vigorous washing with water. DNA patterns with the line width of 50nm were achieved. © IOP Publishing Ltd.