Gold as a promising electrode material for liNbO3-on-insulator (LNOI) SH-SAW resonators: an experimental study

期刊文章

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Tzu-Hsuan Hsu, Zhi-Qiang Lee, Guan-Lin Wu, Chun-Chen Yeh, Chia-Hsien Tsai 和銘晃李

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 卷.71(10), 頁碼.1324-1334

22/08/2024

PMID: 39172608

摘要

Electrodes;Gold;Acoustics;Resonators;Surface acoustic wave devices;Silicon;Couplings

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題名: Gold as a promising electrode material for liNbO3-on-insulator (LNOI) SH-SAW resonators: an experimental study
創作者：: Tzu-Hsuan Hsu (作者) - National Tsing Hua University
Zhi-Qiang Lee (作者) - National Tsing Hua University
Guan-Lin Wu (作者) - National Tsing Hua University
Chun-Chen Yeh (作者) - National Tsing Hua University
Chia-Hsien Tsai (作者) - National Tsing Hua University
銘晃李 (作者)
學術資源類型: 期刊文章
出版日期: 22/08/2024
出版資訊: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 卷.71(10), 頁碼.1324-1334
語言: 英語