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Growth of GaxIn1- xP/Ga0.5In0.5P multiple-quantum-wires by strain induced lateral layer ordering process
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Growth of GaxIn1- xP/Ga0.5In0.5P multiple-quantum-wires by strain induced lateral layer ordering process

A.C. Chen, A.M. Moy, P.J. Pearah, K.C. HsiehK.Y. Cheng
AIP Publishing Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 卷.11(3), 頁.830
1993

摘要

III-V semiconductors;Quantum wires;Superlattices;Photoluminescence;Transmission electron microscopy
A Ga x In1−x P/Ga0.51In0.49P multiple‐quantum‐wire heterostructure was formed in situ through a strain induced lateral layer ordering process occurring spontaneously when (GaP)2/(InP)2 short period superlattices were grown on (100)‐oriented on‐axis GaAs substrates. Cross‐sectional transmission electron microscopy estimated average quantum wire cross sections of ∼50 Å×100 Å leading to a high linear density of ∼100 wires/μm. The existence of the multiple‐quantum wires is also supported by the strong anisotropy for two orthogonal polarizations in polarized photoluminescence measurements.

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