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Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution
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Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution

Y.S. Chu, J.M. Yi, F. De Carlo, Q. Shen, Wah-Keat Lee, H.J. Wu, C.L. Wang, J.Y. Wang, C.J. Liu, C.H. Wang, …
Applied Physics Letters, 卷.92(10), 103119
2008

摘要

Physics and Astronomy (miscellaneous)
Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8-10 keV photons demonstrated a first-order lateral resolution below 40 nm based on the Rayleigh criterion. Combined with the use of a phase contrast technique, this makes it possible to view features in the 30 nm range; good-quality images can be obtained at video rate, down to 50 msframe. The important repercussions on materials science, nanotechnology, and the life sciences are discussed. © 2008 American Institute of Physics.

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