High-Density FinFET One-Time Programmable Memory Cell with Intra-Fin-Cell-Isolation Technology

Ping Chun Peng; Yu-Zheng Chen; Woan Yun Hsiao; Kuang-Hsin Chen; Ching-Pin Lin; Bor-Zen Tien; Tzong-Sheng Chang; Chrong Jung Lin; Ya-Chin King

doi:10.1109/LED.2015.2472300

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High-Density FinFET One-Time Programmable Memory Cell with Intra-Fin-Cell-Isolation Technology

Journal article

Peer reviewed

High-Density FinFET One-Time Programmable Memory Cell with Intra-Fin-Cell-Isolation Technology

Ping Chun Peng, Yu-Zheng Chen, Woan Yun Hsiao, Kuang-Hsin Chen, Ching-Pin Lin, Bor-Zen Tien, Tzong-Sheng Chang, Chrong Jung Lin and Ya-Chin King

IEEE Electron Device Letters, Vol.36(10), pp.1037-1039

01/10/2015

DOI: https://doi.org/10.1109/LED.2015.2472300

Abstract

Anti-fuse OTP

FinFET

high-k dielectric breakdown

logic NVM

The one-time programmable (OTP) cell with intra-Fin-cell-isolation (IFCI) on the FinFET high-k metal gate (HKMG) CMOS process is proposed and demonstrated. The field-enhanced dielectric breakdown at Fin corners enables this OTP cell to be operated at low program voltage with fast program speed. The new intra-Fin cell-to-cell isolation eliminates the required wide spacing in the conventional isolation schemes, which successfully shields the neighboring cells from program and read disturbs. Without introducing extra masks or process steps, the CMOS compatible IFCI OTP cell achieves an ultrasmall cell size of 0.076 μm ² . More than six orders of ON-/OFF-read window is achieved under 4 V programming within 20 μs.

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Title: High-Density FinFET One-Time Programmable Memory Cell with Intra-Fin-Cell-Isolation Technology
Creators - without role: Ping Chun Peng - National Tsing Hua University
Yu-Zheng Chen - National Tsing Hua University
Woan Yun Hsiao - Taiwan Semiconductor Manufacturing Company (Taiwan)
Kuang-Hsin Chen - Taiwan Semiconductor Manufacturing Company (Taiwan)
Ching-Pin Lin - National Tsing Hua University
Bor-Zen Tien - Taiwan Semiconductor Manufacturing Company (Taiwan)
Tzong-Sheng Chang - Taiwan Semiconductor Manufacturing Company (Taiwan)
Chrong Jung Lin - Taiwan Semiconductor Manufacturing Company (Taiwan)
Ya-Chin King - Institute of Electronics Engineering , National Tsing Hua University
Publication Details: IEEE Electron Device Letters, Vol.36(10), pp.1037-1039
Identifiers: 9957767243206774
Academic Unit: Institute of Electronics Engineering, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Journal article

High-Density FinFET One-Time Programmable Memory Cell with Intra-Fin-Cell-Isolation Technology

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