- Title
- High-Reliability HfO2/ZrO2 Superlattice Ferroelectric Poly-Si FinFET Memory Device Utilizing Green Laser Crystallization
- Creators - without role
- 勇賢 巫
- Identifiers
- 9957770668206774
- Academic Unit
- Tsing Hua College, National Tsing Hua University
- Language
- English
- Resource Type
- Journal article
Journal article
High-Reliability HfO2/ZrO2 Superlattice Ferroelectric Poly-Si FinFET Memory Device Utilizing Green Laser Crystallization
24/10/2024
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