Abstract
Nanocrystalline FeCoZr films with gradient Zr composition were prepared by the gradient sputtering (GS) method at room temperature. A uniaxial magnetic anisotropy (UMA) with high H k up to 305 Oe was achieved by controlling the composition gradient of doping element Zr. The origin of UMA can be attributed to the uniaxial stress, which results from the composition gradient. It is interesting to note that promising high-frequency ferromagnetic (FM) properties with resonance frequency of over 3 GHz were achieved in as-deposited GS films without magnetic annealing. This room-temperature fabrication process resolves a critical issue, i.e. to obtain a high resonance FM film material under a compatible technology between FM film preparation and monolithic integrated circuit techniques. © 2008 IOP Publishing Ltd.