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High-precision, cost-effective manufacturing of fused silica microchannels through CNC milling and detachable bonding
期刊文章

High-precision, cost-effective manufacturing of fused silica microchannels through CNC milling and detachable bonding

Chih-Chen Chen, Wei-Jen SoongKyojiro Morikawa
Biomicrofluidics, 卷.19, 頁.054102
16/09/2025

摘要

Microfluidics;Glass fabrication;CNC milling;Microchannel

Microfluidic systems are integral to advancements in biological diagnostics and chemical applications, with glass microchannels playing a pivotal role in enabling chemical processes. However, traditional glass fabrication methods, such as wet and dry etching, remain costly, time-intensive, and reliant on specialized equipment. To overcome these challenges, we introduce an innovative fabrication technique leveraging computer numerical control milling. This method not only accelerates production but also achieves unparalleled microchannel smoothness. By optimizing bonding techniques—specifically oxygen plasma treatment paired with a single sonication step at 0.176 J/m2 bonding energy—we enabled cover glass detachment without compromising the underlying glass substrate. Remarkably, surface roughness was reduced from around 14.7 μm to less than 0.3 μm, demonstrating a 50-fold improvement. Additionally, this approach enhances dimensional accuracy and bonding consistency, offering a scalable solution for high-performance glass microfluidics. This study paves the way for cost-efficient, precise, and robust microfluidic device fabrication, setting a new standard for chemical and diagnostic applications.

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