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High-resolution hard-x-ray microscopy using second-order zone-plate diffraction
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High-resolution hard-x-ray microscopy using second-order zone-plate diffraction

Jaemock Yi, Yong S Chu, Yu-Tung Chen, Tsung-Yu Chen, Y. HwuG. Margaritondo
Journal of Physics D: Applied Physics, 卷.44(23), 232001
06/2011

摘要

Electronic Optical and Magnetic Materials Condensed Matter Physics Acoustics and Ultrasonics Surfaces Coatings and Films
Odd-order diffraction of zone plates (ZPs) is already used for x-ray microscopy but the potential offered by even-order diffraction must still be fully exploited. Width differences between lines and interline spaces transfer intensity from odd-order to even-order diffractions. Here we show that the resulting intense second-order diffraction provides a reasonable tradeoff between spatial resolution and intensity - and constitutes a viable strategy for x-ray microscopy to reach sub-20 nm resolution, in spite of the imperfections of high-aspect-ratio ZPs and of other difficulties. © 2011 IOP Publishing Ltd.

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