Abstract
High-resolution transmission electron microscopy (HRTEM) has been fruitfully applied to study metal/Si interfaces, formation and growth of amorphous interlayers, first nucleated phases, simultaneous occurence of multiphases, epitaxial silicide-Si interfaces, single-crystal silicide-silicon interfaces, twin boundaries and other defects in metal/Si systems. In this paper, examples are presented to highlight the contributions of HRTEM to the understanding of interfaces in metal/Si systems. c 1994.