摘要
This study proposes highly sensitive and flexible strain sensors based on electroplating copper (Cu)/laser-induced graphene (LIG) composites. The sensor response is controlled by adjusting the line width of the grid electrode and the electroplating time of the copper films. The sensor has the highest response as the line width of the grid electrode and the electroplating time are 0.1 mm and 1 min, respectively. The sensor GF in strain ranges of 0–3 %, 3–6 %, and 6–8 % are 7.67, 44.29, and 414.69, respectively. Furthermore, the maximum sensor strain range can reach 8 %. The sensor demonstrates good repeatability, stability, and durability. The temperature sensitivity TCR is 0.0295, 0.0377, 0.055, 0.035, and 0.027 ℃−1 in the temperature range of −80 ℃ - −25 ℃, −25 ℃ - 50 ℃, 50 ℃ - 80 ℃, 80 ℃ - 120 ℃, and 120 ℃ - 140 ℃, respectively. Additionally, the sensor was applied to detect human movement in the joints and the micro-vibration of the wafer handling arm and the ultrasonic vibration platform, which exhibited excellent sensitivity, repeatability, and stability. © 2025 Elsevier B.V.