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Impacts from triple phases of a germanium–antimony–tellurium film coating on thermal emission from SiO2 and boron doped Si
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Impacts from triple phases of a germanium–antimony–tellurium film coating on thermal emission from SiO2 and boron doped Si

Yi-Hua Yang, Jui-Yung Chang, Dong-Han WuYu-Bin Chen
Optical Materials Express, 卷.11(9), 頁碼.3071-3078
09/2021

摘要

Electronic Optical and Magnetic Materials
This work experimentally demonstrates mid-infrared emittance spectra of dielectric and semi-conductor substrates with and without a germanium–antimony–tellurium (GST) film coating. The film experiences non-volatile phase changes at 140°C and 300°C. Impacts from amorphous, face-centered cubic, and hexagonal close packed phases on spectral emittance are demonstrated within the spectral range from 4 µm to 18 µm. The spectra are measured at 100°C, 200°C, 300°C, and 400°C to show temperature dependence. Close-to-total emittance is calculated for comparison. The GST film can reduce emittance from a SiO 2 substrate, but it raises close-to-normal emittance as well as the spectral emittance at wavelengths 5 µm ≤ λ ≤ 18 µm for the doped Si substrate.

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https://doi.org/10.1364/OME.434607檢視
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