Abstract
Improvement of a bulk acoustic wave (BAW) hammer for vibration test of microstructures using 1-3 composite transducers is presented. The characteristics of a BAW hammer produced with the 1-3 composite transducer were simulated by commercial software PIEZOCAD. The composite transducer excited by the pulse waveform acted as a BAW hammer will be evaluated by the vibration testing of microstructures. The experimental results of a BAW hammer with composite structure agree well with the simulation predictions. Moreover, based on the vibration testing result of silicon dioxide beams, 1-3 composite transducers excited by a pulse can improve the waveform duration and bandwidth of BAW hammer used in the vibration testing. Furthermore, the program code can be exploited to design the composite BAW hammer to excite the interested frequency range of the microstructure. The BAW hammer produced by the 1-3 composite transducers is also applicable to the on-line testing of microstructures.