Abstract
Monitoring the atomic-level shear deformation while detecting the shear force in real-time is an important step to elucidate the mechanism of lubrication. This is because the frictional interface is composed of multiple tiny shear deformations. However, observing the nano-scale shear deformation is a great challenge due to some experimental difficulties. In this research, we have developed a technique to combine MEMS (Micro Electro Mechanical Systems) technology with TEM (Transmission Electron Microscopy)(1, 2) to monitor shear deformation and shear force simultaneously.