Abstract
YBa 2 Cu 3 O 7-x (YBCO) superconducting thin films with T c of 89 K and J c of 2.7×10 6 A/cm 2 at 77 K, zero field were prepared by a modified high pressure (1.5 Torr) dc planar diode sputtering process. The design and construction of the simple, economic hot-wall sputtering system which has been achieved in growing high-quality YBCO films on (001)MgO, (001)LaAlO 3 , and (001)YSZ substrates are reported.