Abstract
This report deals with the feasibility of carrying out in-situ monitoring of cavity filling in nanoimprints using capacitance measurements with a capacitance circuit built-in on the mold body. A finite element model valid for the numerical description of a parallel-plate capacitor has been developed, and simulations were carried out to predict the influence of cavity filling on capacitance values. On the other hand, in order to measure the continuous variations in capacitance of a parallel-plate capacitor during the course of imprinting, a series of experiments have been performed isothermally, and the capacitance values have been measured at various imprinting stages. The correlation between capacitance values and replicated polymer heights was studied. The preliminary results presented indicate that capacitance measurement is a feasible tool for the monitoring of cavity filling in nanoimprints. © 2006 The Japan Society of Applied Physics.