摘要
This study explores the influence of oxygen and nitrogen flow ratios on the microstructure and mechanical properties of AlCrTaTiZr high-entropy oxynitride films. Oxygen flow rates (0%–0.75%) were adjusted while maintaining a fixed nitrogen flow ratio (R N = 15%) to fabricate films with similar compositions. The results show that increasing oxygen flow enhanced hardness through solid solution strengthening and grain refinement, though excessive oxygen caused an amorphous structure and reduced hardness. After annealing at 900 °C, the hardness of all films was further increased. The film with a nitrogen flow ratio 40 times higher than oxygen exhibited the highest hardness of 21.8 GPa, along with superior mechanical performance. These findings highlight the potential of high-entropy oxynitride films for applications requiring high wear resistance and adhesion.