Abstract
In this paper, an integration design including a microcoil device and a photodetector with analog-pulse output is proposed for the real-time control and monitoring of magnetic samples or beads of micrometer size. The microcoil array consisting of top metal layers in complementary metal-oxide-semiconductor (CMOS) integrated circuits can successfully manipulate and anchor the magnetic beads by a maximum of 9G of electromagnetic field when driven by 10 mA. In addition, real-time detection of the location and size of the manipulated samples are demonstrated with an integrated pulse-frequency-modulation (PFM) photosensor array. On the basis of the light intensity received on the sensor plane underneath the microcoils, a bioreaction-induced self-luminance process with a minimal illumination of 5:77 × 10 -5 W/m 2 can be successfully identified. This integrated array realized by the CMOS process offers both manipulation and monitoring functions simultaneously, which allows for easier and low-cost parallel bioassay analysis on a single chip. © 2010 The Japan Society of Applied Physics.