Investigation of annealing temperature dependent sub-cycling behavior for HfZrOx-based ferroelectric capacitor

Journal article

Open access

2024

Abstract

ferroelectric capacitor;thin film

url

https://doi.org/10.1063/5.0208118View

Published (Version of record) Open

1 Record Views

Title: Investigation of annealing temperature dependent sub-cycling behavior for HfZrOx-based ferroelectric capacitor
Identifiers: 9957771798406774
Academic Unit: National Tsing Hua University
Language: English
Resource Type: Journal article