- Title
- Investigation of annealing temperature dependent subcycling behavior for HfZrOx-based ferroelectric capacitor
- Creators - without role
- 勇賢 巫
- Publication Details
- APL Materials, Vol.12, p.051118
- Identifiers
- 9957777640106774
- Academic Unit
- Tsing Hua College, National Tsing Hua University
- Language
- English
- Resource Type
- Journal article
Journal article
Investigation of annealing temperature dependent subcycling behavior for HfZrOx-based ferroelectric capacitor
APL Materials, Vol.12, p.051118
17/05/2024
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