Abstract
The thermal dissociation of PH 3 and NH 3 injected through a Ta-based high-pressure gas-injection cell were studied. Using a quadrupole mass spectrometer, the Ta was found to effectively dissociate the PH 3 into primarily P 2 , P 4 , and H 2 molecules with an injector temperature as low as 550 °C. The introduction of NH 3 through this same injector resulted in dissociation into N 2 and H 2 for an injector temperature greater than 900 °C. When NH 3 and PH 3 were coinjected, again P 2 , P 4 , N 2 , and H 2 were the primary molecules produced; however, an additional dimer, PN, was also detected. The PN concentration was maximum at a cell temperature of 700 °C. This dimer was found to be an effective source for introducing nitrogen as an isoelectronic trap in GaP.