Abstract
A highly ordered FePt L1 0 phase was obtained by using an irradiation-induced heating process. He-ion irradiation introduced microscopic energy transfer between incident ions and FePt atoms, excess point defects in FePt films, and direct beam heating. Combining these effects, the ordering was achieved at the nominal surface temperature as low as 230°C. In addition, it was demonstrated that ion irradiation can be an alternative technique for rapid thermal annealing. Furthermore, the ion irradiation with beam heating was potentially produced used magnetic patterning.