Large-area Growth of Superconducting Y-Ba-Cu-O Films by Hot-wall Sputtering Method

R.J. Lin; L.J. Chen; Y.C. Chen; C.C. Chin

doi:10.1109/77.402926

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Large-area Growth of Superconducting Y-Ba-Cu-O Films by Hot-wall Sputtering Method

Journal article

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Large-area Growth of Superconducting Y-Ba-Cu-O Films by Hot-wall Sputtering Method

R.J. Lin, L.J. Chen, Y.C. Chen and C.C. Chin

IEEE Transactions on Applied Superconductivity, Vol.5(2), pp.1789-1792

1995

DOI: https://doi.org/10.1109/77.402926

Abstract

Superconducting Y-Ba-Cu-O films have been deposited on (001)MgO substrates with a diameter of two inches using a simple, economic hot-wall DC sputtering system. The deposition chamber was made of a quartz tube and heated by a tube-furnace outside the chamber. The deposited films are highly oriented with the c-axis perpendicular to the surface of the substrates. The superconducting properties of the films across the 2-inch-diameter area are zero resistance temperatures Tc(R=0) of 88-90 K and critical current densities Jc(77K) of 1.6 - 3.5 x 106 A/cm2. © 1995 IEEE

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Title: Large-area Growth of Superconducting Y-Ba-Cu-O Films by Hot-wall Sputtering Method
Creators - without role: R.J. Lin - National Tsing Hua University
L.J. Chen - Dep. of Materials Science and Eng. , National Tsing Hwa Univ.
Y.C. Chen - Dep. of Materials Science and Eng. , National Tsing Hwa Univ.
C.C. Chin - Materials Research Laboratories , ITRI. Chutung
Publication Details: IEEE Transactions on Applied Superconductivity, Vol.5(2), pp.1789-1792
Identifiers: 9957770839306774
Academic Unit: Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Journal article

Large-area Growth of Superconducting Y-Ba-Cu-O Films by Hot-wall Sputtering Method

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