- 題名
- Large-displacement thermal actuator designed for MEMS pitch tunable grating
- 創作者：
- Yu-Sheng Yang (作者) - National Tsing Hua UniversityYu-Hsin Lin (作者) - National Institutes of Applied ResearchYi-Chiuen Hu (作者) - National Institutes of Applied ResearchCheng-Hsien Liu (作者) - 國立清華大學工學院動力機械工程學系
- 學術資源類型
- 期刊文章
- 出版日期
- 2009
- 出版資訊
- J. Micromechanics and Microengineering J. Micromechanics and Microengineering, 卷.19, 頁碼.1-12
- 語言
- 中文
期刊文章
Large-displacement thermal actuator designed for MEMS pitch tunable grating
J. Micromechanics and Microengineering J. Micromechanics and Microengineering, 卷.19, 頁碼.1-12
2009
指標
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