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Liquid-phase epitaxial growth of In0.35Ga0.65P on GaP substrates from Sn-rich solutions
Journal article   Peer reviewed

Liquid-phase epitaxial growth of In0.35Ga0.65P on GaP substrates from Sn-rich solutions

Lung-Chien Chen and Meng-Chyi Wu
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol.36(9 A), pp.5623-5627
09/1997

Abstract

InGaP alloy Liquid-phase epitaxy Sn-rich solutions
Good-quality In 0.35 Ga 0.65 P layers have been grown on (11l)B-oriented GaP substrates by liquid-phase epitaxy from Sn-rich solutions using the supercooling technique. The InGaP epitaxial layers exhibit a mirrior-like surface morphology and a flat interface without any inclusions. The growth rate of InGaP layers grown from Sn-rich solutions is found to be considerably lower than that from In-rich solutions. The minimum electron concentration of 1.1 × 10 18 cm -3 obtained is attributed to the Sn-doped epitaxial layer grown from the Sn-rich solution. Three emission peaks in photoluminescence spectra of the InGaP layers are indentified as the near band-to-band, donor-to-valence band, and donor-acceptor pair transitions. In addition, the InGaP/GaP sample has a good interface examined by high resolution transmission electron microscope.

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