Abstract
The growth of (In,Mn)As thin films with a thickness 300-600 nm was discussed using organometallic vapor phase epitaxy (OMVPE). It was observed that these films showed ferromagnetism above room temperature. Extended x-ray absorption fine structure (EXAFS) technique was used to analyze the local structure around Mn atoms in thin films. A short-range order was observed for InMnAs prepared by the OMVPE process compared to that of the molecular beam epitaxy (MBE) deposited films.