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Low specific contact resistance of gallium zinc oxide prepared by atomic layer deposition contact on p+-GaAs for high-speed near-infrared light-emitting diode applications
Journal article   Peer reviewed

Low specific contact resistance of gallium zinc oxide prepared by atomic layer deposition contact on p+-GaAs for high-speed near-infrared light-emitting diode applications

Shang-Fu Chen, He-Long Syu, Chien-Lan Liao, Yung-Fu Chang, Chi-Chen Huang, Chong-Lung Ho and Meng-Chyi Wu
IEEE Electron Device Letters, Vol.34(8), pp.972-974
2013

Abstract

3-dB modulation bandwidth atomic layer deposition (ALD) GaAs gallium-doped ZnO (GZO) light-emitting diodes (LEDs) specific contact resistance
In this letter, we investigate the fabrication and characterization of high-speed GaAs-based near-infrared (near-IR) light-emitting diodes (LEDs) by using gallium-doped zinc oxide (GZO) as the current-spreading layer. For the GZO contacts to p + -type GaAs prepared by atomic layer deposition, the minimum specific contact resistance of 1.7× 10 -5 Ω-cm 2 is obtained. The GaAs-based near-IR LEDs with an aperture diameter of 59 μ m and a smaller bonding pad of 80 μ m have a low forward voltage of 1.7 V at 20 mA, a series resistance of 5.6 Ω, the total capacitance of 17.5 pF, and a light output power of 4.6 mW at 50 mA. By the design of a ring-shaped electrode overlapping with GZO film, the LED exhibits a 3-dB modulation bandwidth of 107.8 MHz at a driving current of 50 mA owing to the increase of injected current density into the confined region. © 1980-2012 IEEE.

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