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Low thermal budget bonding for 3D-package by collapse-free hybrid solder
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Low thermal budget bonding for 3D-package by collapse-free hybrid solder

Tzu-Ting Chou, Rui-Wen Song, Hao ChenJenq-Gong Duh
Materials Chemistry and Physics, 卷.238, 121887
12/2019

摘要

Hybrid solder Interface structure Intermetallic compounds Microelectronic packaging Semiconductor Materials Science (all) Condensed Matter Physics
The collapse-free joints were successfully built under a low reflowing temperature of 185 °C via using the Sn–Ag–Cu(-Ni)/Sn–Bi hybrid solders. Such a structure with middle and low melting points solders could prevent the infrastructure of 3D packages from collapse caused by overweight of stacked dies on substrates. Furthermore, a low bonding temperature could reduce the consumption of thermal budget during chip fabrication. By introducing Ni-doped Sn–Ag–Cu solder, the potential harm micro-Ag Sn particles adjacent to the interfacial Cu Sn layer in Sn–Ag–Cu/Sn–Bi/Cu joints were suppressed. Also, the microstructure of the hybrid joints was investigated in detail as well.

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