Mask polarization effects in hyper NA systems

Journal article

Chun-Kuang Chen, Tsai-Sheng Gau, Tsai-Sheng Gau, Lin-Hung Shiu and 本堅林

SPIE Proceedings, Vol.5754, pp.1128-1137

2005

Abstract

Optical lithography;polarized imaging;high-NA systems

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Title: Mask polarization effects in hyper NA systems
Creators - without role: Chun-Kuang Chen
Tsai-Sheng Gau
Tsai-Sheng Gau
Lin-Hung Shiu
本堅林
Publication Details: SPIE Proceedings, Vol.5754, pp.1128-1137
Identifiers: 9957767675806774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Journal article