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Material and ultrafast optoelectronic properties of furnace-annealed arsenic-ion-implanted GaAs
Journal article   Peer reviewed

Material and ultrafast optoelectronic properties of furnace-annealed arsenic-ion-implanted GaAs

Gong-Ru Lin, Wen-Chung Chen, C.-S. Chang, Shyh-Chin Chao, Kaung-Hsiung Wu, T.M. Hsu, W.C. Lee and Ci-Ling Pan
IEEE Journal of Quantum Electronics, Vol.34(9), pp.1740-1748
09/1998

Abstract

Arsenic-ion-implanted GaAs Photocooductive switch Ultrafast optoelectronics
Structural, electrical, and ultrafast optical properties of furnace-annealed arsenic-ion-implanted GaAs (GaAs:AS + ) has been investigated for its applications in ultrafast optoelectronics. From these studies, we determine that GaAs substrates implanted with 200-keV arsenic ions at 10 16 ions/cm 2 and furnace-annealed at 500 °C-600 ° C would have recovered its crystallinity, be highly resistive, and exhibit picosecond photo-excited carrier lifetimes. The duration of the electrical pulses generated by photoconductive switches (PCS's) fabricated on the optimized material was ≈4 ps, The risetime (10%-90%) and 1/e falltime were, respectively, ≈2 and 3 ps These results were measurement-system limited. We estimated the actual response to be ≈2 ps, consistent with a photo-excited carrier lifetime of ≈ ps. The peak responsivity was ≥4×10 -3 A/W. The dark current for the GaAs : As + PCS biased at 40 V was as low as 5 nA, The break down field was higher than 150 kV/cm. These characteristics are comparable to those of state-of-the-art photoconductors such as LT-GaAs.

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