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Mechanical and optical properties of ITO films with anti-reflective and anti-wear coatings
期刊文章

Mechanical and optical properties of ITO films with anti-reflective and anti-wear coatings

W.-F. Wu 和 B.-S. Chiou
Applied Surface Science, 卷.115(1), 頁碼.96-102
1997
DOI: https://doi.org/10.1016/S0169-4332(96)00852-5
Web of Science ID: WOS:A1997WX17800013

摘要

Adhesion Antireflection coatings Cladding (coating) Hardness Opacity Protective coatings Semiconducting indium compounds Silica Strength of materials Substrates Surface properties Pull off strength Radiofrequency magnetron sputtered indium tin oxide film Scratch adhesion strength Scratch critical load Semiconducting films
In this study, radio frequency (rf) magnetron sputtered ITO films were coated with reactively sputtered SiO 2 films. The microhardness, pull-off strength, scratch adhesion strength, optical transmittance and reflectance of the SiO 2 /ITO/substrate system are investigated. Coating of SiO 2 enhances both the hardness and pull-off strength and reduces the scratch critical load of the system. The optical transmittance in the visible range is also improved with the addition of SiO 2 .

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-0031139951&doi=10.1016%2fS0169-4332%2896%2900852-5&partnerID=40&md5=21798ca667c485a7216b9aeb849fc01c檢視

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