摘要
We show quasicrystal formation by annealing multilayers of Al, Cu and Fe. The mechanical and surface properties of quasicrystals are affected by the parameters of annealing process. Here, multilayer Al-Cu-Fe thin film samples with different compositions were sputtered on Si/SiO 2 substrates and subjected to a two-step annealing process for different durations (5, 10 and 15 h). X-ray diffraction analyses indicated that the 15-h annealed sample had a sharper quasicrystal peak, which was more stable than any other phases. From the XRD data, the amount of each phase was calculated; the sample with longer annealing duration revealed a high amount of ψ-phase (84.3% crystallinity of quasicrystal) with a small amount of cubic Al 50 (CuFe) 50 phase. Nanoindentation tests and contact angle measurements showed that this sample also had the greatest hardness (∼11 GPa) and the highest contact angle (127°), respectively.