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Mechanical properties of Mo-Ru thin films with Ni interlayer of different thickness
Journal article   Peer reviewed

Mechanical properties of Mo-Ru thin films with Ni interlayer of different thickness

Chi-Yun Kang, Yung-I Chen, Chih-Hsiung Lin and Jenq-Gong Duh
Applied Surface Science, Vol.253(14), pp.6191-6195
15/05/2007

Abstract

DC sputter Mo-Ru Ni interlayer Scratch
Noble metal coatings are usually introduced to increase lifetime of glass molding die. In this study, Mo-Ru coatings with Ni interlayer were deposited on tungsten carbide by DC sputtering processes at an elevated temperature of 550 °C to modify the properties in molding die materials. Phase identification was investigated by X-ray diffractometry (XRD). The surface morphology and composition of coatings were evaluated by atomic force microscopy (AFM) and field-emission electron probe microanalyzer (FE-EPMA), respectively. Hardness of the Mo-Ru films was measured by nanoindentation testing. In the aspects of adhesion, the influence on interlayer of different thickness was probed by the scratch test, and the different composition of Mo-Ru resulted in various kinds of fracture configurations. The scratch test exhibited spalling and chipping failure between substrate and layer. © 2007 Elsevier B.V. All rights reserved.

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