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Journal article
Methods to Print Optical Images at Low-k1 Factors
本堅 林
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SPIE Proceedings, Vol.1264, p.2
1990
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Abstract
Optical lithography;resolution enhancement;phase-shifting masks;off-axis illumination;optical proximity correciton
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Title
Methods to Print Optical Images at Low-k1 Factors
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本堅 林
Publication Details
SPIE Proceedings, Vol.1264, p.2
Identifiers
9957766841906774
Academic Unit
Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language
Traditional Chinese
Resource Type
Journal article
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