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Micro Electrothermal Actuators and Their Applications on Micro-Optics
Journal article

Micro Electrothermal Actuators and Their Applications on Micro-Optics

國賓 李, Yen-Heng Lin, Heng-Hui Liu, Chen-Sho Shey and Rong-Sheng Chan
Bulletin of The College of Engineering, pp.1-10
2001

Abstract

Micro Electrothermal Actuators and Their Applicati

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