Abstract
Novel electrode patterning techniques on thin polymer substrates were developed on a roll-to-roll (reel-to-reel, R2R) printing system. Hot embossing, laser ablation, and lift-off processes were evaluated for mass production for active-matrix display arrays with 1000μm display pixels by using the concept of micro electro mechanical system (MEMS) Fabry-Perot etalon. Among which, the newly developed lift-off flexography process provided the best pattern integrity with 100μm resolution. The demonstrator of display array proved R2R printing system's possibility and capability under 1 m/s speed. A complete multilayer stack demonstration with alignment process also indicated its variable application. Further actuation for the MEMS display proved the robustness of device made by printing techniques. © 2009 The Japan Society of Applied Physics.