- Title
- Microhardness of (Ti,Al)N films deposited by reactive R.F. magnetron sputtering
- Creators - without role
- Chi-Tung Huang - Dept. of Mat. Sci. and Engineering , National Tsing Hua UniversityJenq-Gong Duh - Dept. of Mat. Sci. and Engineering , National Tsing Hua University
- Identifiers
- 9957774967206774
- Academic Unit
- National Tsing Hua University
- Language
- English
- Resource Type
- Journal article
- Publication Details
- Journal of Materials Science Letters, Vol.16(1), pp.59-61
Journal article
Microhardness of (Ti,Al)N films deposited by reactive R.F. magnetron sputtering
Journal of Materials Science Letters, Vol.16(1), pp.59-61
1997
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