Abstract
The soft magnetic properties and microstructure changes in the FeSiAIRuTi films due to post annealing treatments were investigated. It was found in this study that the decrease of coercivity and increase of permeability of the films by annealing treatment are correlated to the reduction of dislocation density and formation of D0 3 superlattice, rather than the grain coarsening or preferred orientation. © 1993 IEEE