Microstructures and mechanical properties of Sb-doped ZnO thin films deposited on a-plane sapphire substrates

期刊文章

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Hou-Guang Chen, Phuoc Huu Le, I-Ju Teng, Yu-Min Hu, Wu-Ching Chou, Jenh-Yih Juang 和 Sheng-Rui Jian

Ceramics International, 卷.50(1), 頁碼.614-621

2024

摘要

Hardness;Nanoindentation;Pop-in;Sb-doped ZnO thin films;XPS;XRD

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題名: Microstructures and mechanical properties of Sb-doped ZnO thin films deposited on a-plane sapphire substrates
創作者：: Hou-Guang Chen (作者)
Phuoc Huu Le (作者) - Ming Chi University of Technology
I-Ju Teng (作者)
Yu-Min Hu (作者) - National University of Kaohsiung
Wu-Ching Chou (作者)
Jenh-Yih Juang (作者)
Sheng-Rui Jian (作者)
學術資源類型: 期刊文章
出版日期: 2024
出版資訊: Ceramics International, 卷.50(1), 頁碼.614-621
語言: 英語