Abstract
A quantitative study of the Te depth profile and structural changes in a series of CdS/CdTe heterojuctions annealed at various temperatures by employing X-ray reflectivity and angular dependence of X-ray fluorescence (ADXRF) was presented. The temperature dependence of surface roughening and Te migration was observed in reflectivity and flourescence experiments. It was found that the changes in the interface morphology and Te distribution were quantified by detailed analysis of the angular dependence of x-ray fluorescene (ADXFR) data with the aid of reflectivity measurements. The results showed that a large amount of Te up to 50% could migrate into the CdS layer.