Abstract
This paper presents an x-ray machining system for the fabrication of three-dimensional microstructures with free-form surfaces. The structures with different sizes and various shapes can be generated by a single mask combining with precise moving paths. By adjusting the motions such as path types, overlaps and velocities, various 3D microstructures with complex features can be fabricated. The idea and the construction of this system, fabrication details and successful preliminary experimental results are introduced in this paper. © 2012 IOP Publishing Ltd.