- Title
- Multilevel Cell Ferroelectric HfZrO FinFET With High Speed and Large Memory Window Using AlON Interfacial Layer
- Creators - without role
- 永俊 吳
- Identifiers
- 9957769577106774
- Academic Unit
- Institute of Nuclear Engineering and Science, College of Nuclear Science, National Tsing Hua University
- Language
- English
- Resource Type
- Journal article
- Publication Details
- IEEE Electron Device Letters
Journal article
Multilevel Cell Ferroelectric HfZrO FinFET With High Speed and Large Memory Window Using AlON Interfacial Layer
IEEE Electron Device Letters
2022
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