Nano-scale observation of frictional deformation at Ag single point contact with MEMS-in-TEM setup

Monitoring atomic-level deformation of a frictional interface in real time is crucial for tribology research at micro and nano scale. We have combined nano-scale handling capabilities of MEMS technology with the supreme observation ability of TEM and developed a MEMS-in-TEM experimental setup. We succeeded in observing the frictional deformation of silver interface and measuring its shear force simultaneously.