摘要
The bimorph cantilever beams of high photothermal efficiency based on LSPR (localized surface plasmon resonance) of silver-NPs (silver-nanoparticles) were demonstrated. The silver-NPs converted absorbed optical energy of 14% into heat at maximum of 530 nm. The beams had a length of 350 μm, a width of 40 μm and the total thickness of 770 nm. They were composed of 400 nm thick PVP (poly(vinylpyrrolidone)) embedded with silver-NPs and 370 nm thick silicon nitride. The beams bent up vertically by a deflection of 30 μm under an optical intensity of 500 W cm -2 using a green laser. The corresponding mechanical and thermal response times were 0.25 ms and 10 ms, respectively. © IOP Publishing Ltd.