Abstract
Single- and double-walled carbon nanotubes were synthesized between predefined TiNiCrTi multilayer stacks for field-effect transistor fabrication by thermal chemical vapor deposition at 900 °C. The Ni nanoprecipitates were induced from Cr matrix because of phase segregation during high temperature process of carbon nanotube growth. The Ni-Cr catalyst was shown to significantly enhance the synthesis of single- and double-walled carbon nanotubes compared to those using pure Ni catalyst, which was demonstrated by both physical and electrical characteristics of the carbon nanotube field-effect transistor fabricated. © 2007 American Institute of Physics.