摘要
In this letter, we demonstrate a simple and sensitive parallel-plate capacitive pressure sensor fabricated on biocompatible, weather durable, elastic composite silicone, and polyurethane substrate with porous polydimethylsiloxane (PDMS) dielectric made through a mixture of water as spacers. This sensor comprised a graphene electrode, which was developed through novel chemical vapor deposition on copper with hot press transfer process. The sensitivity of the sensor exhibits a positive correlation with the dielectric porosity. In addition, this device exhibits fast response time and wide dynamic window for applications. The highest sensitivity of 3.01 kPa-1 at 20% water concentration in PDMS for the dynamic range of 0-40 kPa was achieved with a response time of 0.25 s and detection resolution of 0.4 pF.