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Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate
Journal article   Peer reviewed

Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate

Cheng-Yao Lo, Johanna Hiitola-Keinänen, Olli-Heikki Huttunen, Jarno Petäjä, Jukka Hast, Arto Maaninen, Harri Kopola, Hiroyuki Fujita and Hiroshi Toshiyoshi
Microelectronic Engineering, Vol.86(4-6), pp.979-983
04/2009

Abstract

Fabry-Perot Flexible display MEMS Roll-to-roll
A novel electrode patterning technique by using lift-off a sacrificial black ink layer on thin polymer substrate was performed on a roll-to-roll (reel-to-reel, R2R) printing system. An active-matrix display array was demonstrated by this technique with 2000 μm display pixels with concept of MEMS (micro electro mechanical system) etalon. The resolution of this flexography lift-off system was improved to 100 μm for pattern isolation from gravure printing. Compare to well-developed hot embossing or laser ablation for polymer substrate's patterning, R2R lift-off provides a flat and smooth surface which is a must for multilayer stacking and reliability. This system also provides a high pattern integrity, low cost, large scale, and high throughput solution for electrode patterning on flexible polymer substrate. © 2009 Elsevier B.V. All rights reserved.

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